BS ISO 13084:2018,Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer.
Secondary ion mass spectrometry (SIMS) is a powerful technique for the analysis of organic and molecular surfaces. Over the last decade, instrumentation has improved significantly so that modern instruments now have very high repeatability and constancy.An increasing requirement is for the dentification of the chemical composition of complex molecules from accurate measurements of themass of the secondary ions.
BS ISO 13084:2018 describes a simple method, using locally sourced material, to optimize the instrumental parameters, as well as a procedure to ensure that accurate calibration of the mass scale is achieved within a selectable uncertainty.
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